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APC valve seal

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APC valve seal

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Product description: It is a perfluoroether sealing ring specially developed for VAT equipment in the DRY ETCH process of 6G, 8.5G and 10.5G. Offers: excellent plasma resistance; excellent abrasion resistance; ultra-high temperature resistance; dust minimization and good compression set.

 

 

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PROCESS

GEN.

Material

SIZE

 
 

DRY ETCH

6G
8.5G
10.5G

FFKM

AS568A-278

 

FFKM

AS568A-279

 

FFKM

AS568A-280

 

FFKM

AS568A-329

 

 

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Time of issue:2019-05-23 00:00:00

  

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