Products and Services
Magnetically Levitated Molecular Pump
- Detailed description
-
- Commodity name: Magnetically Levitated Molecular Pump
● Due to the advantages of no contact, no friction, no need for lubrication and no maintenance, magnetic bearings can meet the stringent requirements for bearings of high-clean, high-vacuum molecular pumps; ● The magnetic levitation molecular pump can achieve five degrees of freedom active control to make the rotor operate stably at any angle, and can be installed in all directions; ● The magnetic bearing system itself has a displacement sensor, which makes it easy to achieve online dynamic balancing of the rotor; ● By controlling the unbalance of the magnetic bearing rotor, the rotor rotates around its inertia main axis, reducing the same-frequency vibration caused by the rotor rotation; ● The complete magnetic bearing fault diagnosis method reduces the risk of product failure and extends the service life of the product.
● Due to the advantages of no contact, no friction, no need for lubrication and no maintenance, magnetic bearings can meet the stringent requirements for bearings of high-clean, high-vacuum molecular pumps;
● The magnetic levitation molecular pump can achieve five degrees of freedom active control to make the rotor operate stably at any angle, and can be installed in all directions;
● The magnetic bearing system itself has a displacement sensor, which makes it easy to achieve online dynamic balancing of the rotor;
● By controlling the unbalance of the magnetic bearing rotor, the rotor rotates around its inertia main axis, reducing the same-frequency vibration caused by the rotor rotation;
● The complete magnetic bearing fault diagnosis method reduces the risk of product failure and extends the service life of the product.
Application equipment: etching machine, metal deposition system, silicon epitaxial system, PVD, CVD, SiC crystal growth system, etc.
Technical Specifications
Model
GTP-M2201
GTP-M3400
GTP-M4500
sub-category
GTP-M2201
GTP-M2201C
GTP-M3400 C(V)
GTP-M3400 B(V)
GTP-M4500 C(V)
Inlet port flange size
VG200/IS0200F/
ICF253
VG250/IS0250F/
ICF305
VG250/ISO250F/
ICF305
VG300/ISO320F/
VG350
VG300
ISO320F
Exhaust port flange size
KF40
KF40
KF40
N2 pumping speed (L/s)
1850
2200
2700
3200
3800
4000
Ar pumping speed (L/s)
1650
2000
2400
2800
2700
Compression ratio N2/ Ar
＞107
>108
>108
Ultimate pressure （Pa（Torr））
10-7（10-9）[After baking]
10-7 (10-9) [After baking]
10-7 (10-9) [After baking]
Allowable front stage pressure （Pa）
255
255
255
Maximum N2 flow （SCCM）
1300
2400
2200
Maximum Ar flow （SCCM）
700
1700
1900
Rated speed (rpm)
36500
27600
24000
Standby speed (rpm)
约6000
5000
5000
Start time (min)
≤8
≤10
≤13
Stop time (min)
≤9
≤16
≤21
Cooling method
water cooling water cooling water cooling Noise （dB）
55
55
55
Installation time and angle
arbitrary arbitrary arbitrary Input voltage (V)
200-240
200-240
200-240
Maximum input power without TMS
750（VA）
1500（VA）
1700（VA）
Maximum input power with TMS
1050（VA）
1850（VA）
2250（VA）
Weight （kg）
45
80
83
109/111
105/111
Pumping Speed Curve
Product inquiry
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Beijing Grand Hitek Co.,Ltd
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