Magnetic levitation molecular pump
- Detailed description
-
- Commodity name: Magnetic levitation molecular pump
◆ Due to the advantages of no contact, no friction, no lubrication and no Overhaul, magnetic bearings can meet the demanding requirements of high cleanliness and high vacuum molecular pumps; ◆ The magnetic levitation molecular pump can realize five degrees of freedom active control, so that the rotor can run stably at any angle, and can be installed in all directions;
◆ Due to the advantages of no contact, no friction, no lubrication and no Overhaul, magnetic bearings can meet the demanding requirements of high cleanliness and high vacuum molecular pumps;
◆ The magnetic levitation molecular pump can realize five degrees of freedom active control, so that the rotor can run stably at any angle, and can be installed in all directions;◆ The magnetic bearing system itself is equipped with a displacement sensor, which is easy to realize the online dynamic balancing of the rotor;
◆ By controlling the imbalance of the magnetic bearing rotor, the rotor can rotate around its inertia axis, reducing the same frequency vibration caused
by rotor rotation;
◆ A comprehensive fault diagnosis method for magnetic bearings, reducing the risk of product failures and extending the service life of products.
◆ Application equipment: Etching machine, metal deposition system, silicon epitaxy system, PVD, CVD, SiC crystal growth system, etc
Technical parameters
Model
GMTP-1400
GMTP-2300
GMTP-3200
Pumping speed (N2，L/s)
1400
2300
3200
Exhaust port flange
DN40 ISO-KF
DN40 ISO-KF
DN40 ISO-KF
Air inlet flange
LF200/CF200
LF250/CF250
LF320/CF320
Ultimate pressure (Pa)
≤ 2 × 10-7(LF)
≤ 2 × 10-9(CF)≤ 2 × 10-7(LF)
≤ 2 × 10-9(CF)≤ 2 × 10-7(LF)
≤ 2 × 10-9(CF)Recommended starting pressure (Pa)
≤ 200
≤ 200
≤ 200
Rated speed (rpm)
36000 (adjustable)
30000 (adjustable)
28000
Startup time (min)
≤ 7
≤ 7
≤10
Vibration value (um)
≤ 0.01
≤ 0.01
≤ 0.01
Proposed forex pump (L/s)
8-15
15-22
≥ 22
Water nozzle
Water pipe with outer diameter *10 Water pipe with outer diameter *10 Water pipe with outer diameter *10 Cooling mode
Water-cooling
Water-cooling
Water-cooling
Cooling water flow rate (L/min)
≥ 1
≥2
≥3
Cooling water pressure (MPa)
≥0.15
≥0.15
≥0.15
Cooling water temperature (℃)
20±5
20±5
20±5
Cooling water temperature (℃) 0~40
0~40
0~40
Installation mode
optional position
optional position optional position Weight (including controller) (kg)
47
58
80
Product inquiry
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Beijing Grand Hitek Co.,Ltd
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E-mail:sales@grandhitek.com.cn
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