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GLR Series Multistage Roots Dry Vacuum Pump

● GLR series dry pumps can be used in clean processes and general processes, with high reliability and extremely low operating cost; ● Suitable for diversified markets, widely used in semiconductor, advanced displays, LED, lithium-ion battery and solar PV industries.
  • Detailed description
  • Specifications
    • Commodity name: GLR Series Multistage Roots Dry Vacuum Pump

    ● GLR series dry pumps can be used in clean processes and general processes, with high reliability and extremely low operating cost; ● Suitable for diversified markets, widely used in semiconductor, advanced displays, LED, lithium-ion battery and solar PV industries.

    ● GLR series dry pumps can be used in clean processes and general processes, with high reliability and extremely low operating cost;

    ● Suitable for diversified markets, widely used in semiconductor, advanced displays, LED, lithium-ion battery and solar PV industries.

     

    Application Challenges and Application Areas

    Process Condensation Recommended Products
    loadlock   GLR
    Transfer   GLR
    PVD   GLR
    Coater ● GLR

  •  

    Technical Specifications

    Model Maximum Pumping Speed Ultimate Pressure Inlet Port Diameter Exhaust Port Diameter Supply Voltage Rated power Operating Power Cooling Water Nitrogen Weight Noise
    （m3/h） (mbar) （ISO） （NW） （V） （kw） （KW） （L/m） （slm） （kg） dB(A)
    GLR120 110 ＜3×10-2 63 25 208/380 2.2 0.45 1.5 0-12 69 ＜60
    GLR500 500 ＜1×10-2 63 50 208/380 15 5.7 6 7-100 350 ＜70
    GLR2000 2300 ＜7×10-3 160 50 208/380 26 6.7 6 7-100 750 ＜70
    GLR3000 3380 ＜7×10-3 160 50 208/380 26 6.7 6 7-100 820 ＜70
    GLR3500 3500 ＜5×10-3 160 50 380 26 9.5 6 4-50 820 ＜75
    GLR5000 4500 ＜8×10-3 160 50 380 30 7.5 6 4-12 900 <80

     

    Dimensions

    Model Length（mm） Width（mm） Height（mm）
    GLR120 448 230 275
    GLR500 1310 620 682
    GLR2000 1310 620 1002
    GLR3000 1310 620 1002
    GLR3500 1310 620 1002
    GLR5000 1310 620 1002

     

    Pumping Speed Curve

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Beijing Grand Hitek Co.,Ltd

Telephone:+86-10-86229784

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