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Multi-stage Roots vacuum pump GLR

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Multi-stage Roots vacuum pump GMR

Detailed description
Specifications

Commodity name: Multi-stage Roots vacuum pump GMR

● GMR series dry pump, can be used in cleaning process and general harsh process; ● High reliability, very low cost; ● It is mainly suitable for etching and ion implantation process cavity in semiconductor industry. <img src="https://omo-oss-image.thefastimg.com/portal-saas/new2024020415251217007/cms/image/a694d20b-eaca-43ce-abcd-46814a119b13.jpg" style="width: auto; height: auto; max-width:570px;" />

Dimensions

Model	Length (mm)	Width (mm)	Height (mm)
GMR200	695	290	434
GMR600	695	290	706
GMR1200	695	290	706

Technical parameters

Model

Maximum pumping speed
(m³/h)

Ultimate vacuum
(mbar)

Inlet diameter（ISO）

Outlet diameter（NW）

Supply voltage（V）

Rated power（kw）

Operating power
（kw）

Cooling water（L/m）

Nitrogen（slm）

Power input
jack

Weight
(kg)

Noise
dB(A)

GMR200

210

0.005

ISO63

NW25

208/380

1.9

0.7

1.9

20~40

HAN 40A

140

<63

GMR600

610

0.005

ISO100

NW25

208/380

3.8

1.1

2.1

20~90

HAN 40A

250

<63

GMR1200

1050

0.005

ISO100

NW25

208/380

3.8

1.3

2.1

20~90

HAN 40A

250

<63

Pumping speed curve

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Beijing Grand Hitek Co.,Ltd

Telephone:+86-10-86229784

E-mail:sales@grandhitek.com.cn

Headquarters Address: No.1 Courtyard, Kechuang 15th Street, Majuqiao Town, Tongzhou District, Beijing
Hebei Base: Building 4, Environmental Protection Industrial Park, South Development Zone, Gu 'an County, Langfang City, Hebei Province
Hubei Base: No.1 Huahai Avenue, Huangzhou District, Huanggang City, Hubei Province
Zhejiang Base: Building 6, Yuexing Science Park, No.11 Prosperous Road, Lihai Street, Binhai New District, Shaoxing City
Shenzhen Base: Building 2, Colorful Industrial Park, No.8, Lanzhu East Road, Pingshan District, Shenzhen
Wuxi Base: Building 6, No.3, Rongyang 1st Road, Xishan Economic and Technological Development Zone, Wuxi City
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