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GHC Series New Integrated Claw Dry Vacuum Pump

● GHC series dry pumps can be used in clean processes, general processes and harsh process applications. They have strong dust handling capabilities and are the first choice for harsh process applications. They have high reliability and extremely low operating cost; ● Suitable for diversified markets and widely used in semiconductor, advanced displays and other industries.
  • Detailed description
  • Specifications
    • Commodity name: GHC Series New Integrated Claw Dry Vacuum Pump

    ● GHC series dry pumps can be used in clean processes, general processes and harsh process applications. They have strong dust handling capabilities and are the first choice for harsh process applications. They have high reliability and extremely low operating cost; ● Suitable for diversified markets and widely used in semiconductor, advanced displays and other industries.

    ● GHC series dry pumps can be used in clean processes, general processes and harsh process applications. They have strong dust handling capabilities and are the first choice for harsh process applications. They have high reliability and extremely low operating cost;

    ● Suitable for diversified markets and widely used in semiconductor, advanced displays and other industries.

     

    Application Challenges and Application Areas

    Process Condensation Corrosion Dust Thermal Reaction

    Combustible Gas Pumping

    		 Recommended Products
    ALD ● ● ● ● ● GHC
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    LPCVD ● ● ●   ● GHC
    SACVD ●   ● ● ● GHC
    MOCVD ●     ● ● GHC
    Metal Etch ● ●       GHC
    Key words:
    • 真空泵

  •  

    Technical Specifications

    Model Maximum Pumping Speed Ultimate Pressure Inlet Port Diameter Exhaust Port Diameter Supply Voltage Rated power Operating Power Cooling Water Nitrogen Weight Noise
    (m3/h) (mbar) (ISO) (NW) （V） （kW） （kW） (L/min) （slm） （kg） dB(A)
    GHC200 220 ＜2×10-2 100 40 208/380 7.5 2.7 2.7 20-40 265 ＜70
    GHC500 510 ＜2×10-2 100 40 208/380 11 6 6 40-90 360 ＜70
    GHC600 680 ＜5×10-3 100 40 208/380 12 4.1 3 40-90 467 ＜70
    GHC1200 1250 ＜5×10-3 100 40 208/380 12 4.6 4.2 40-90 467 ＜70
    GHC1800 1850 ＜5×10-3 160 40 208/380 12 4.9 4.7 40-90 500 ＜70
    GHC3000 3200 ＜5×10-3 160 40 208/380 18.5 7.8 11 40-130 853 ＜70
    GHC5000 4480 ＜5×10-3 200 40 208/380 18.5 9.3 11 40-130 905 ＜70
    GHC6000 5500 ＜5×10-3 250 40 208/380 18.5 9.3 11 40-130 945 ＜70

     

    Dimensions

    Model Length（mm） Width（mm） Height（mm）
    GHC200 1150 442 519
    GHC500 1196 580 617
    GHC600 901 396 790
    GHC1200 901 396 790
    GHC1800 901 396 787
    GHC3000 1000 517 970
    GHC5000 1000 517 970
    GHC6000 1100 517 970

     

    Pumping Speed Curve

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Beijing Grand Hitek Co.,Ltd

Telephone:+86-10-86229784

E-mail:sales@grandhitek.com.cn

Headquarters address: No. 1, Kechuang 15 Jie (St) , Beijing Economic Technological Development Area

Hebei base: Building 9, Environmental Protection Industrial Park, South District, Gu'an County Industrial Zone, Langfang City

Hubei base: Attached fifth floor, Commercial Building, No. 366, Lin Konggang Avenue, Jinghe Street, Dongxihu District, Wuhan

Zhejiang base: Building 17, No. 2723, Fuchunwan Avenue, Chunjiang Street, Fuyang District, Hangzhou

Shaanxi base: Building 2, No. 46, Zhangbawu Road, Xi'an High-tech Zone

Shanghai Base: Building 9, Fuhai Business Court, Lane 299, Bisheng Road, Pudong New District, Shanghai

Minhang Base: Building 4, No. 99 Suijiang Road, Minhang District, Shanghai

Sichuan Base: Building 9, No. 665 Fujia Street, Huangjia Street, Chengdu Shuangliu Economic Development Zone, Shuangliu District, Chengdu City

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