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Industry Applications

Hot Products

Multi-stage Roots vacuum pump GLR

New integrated claw vacuum pump GS

New integrated claw vacuum pump GHC

Semiconductor

Application challenges and areas

Technology	Condensation	Corrosion	Dust	Thermal reaction	Combustible gas pumping	Recommend products
ALD	Y	Y	Y	Y	Y	GHC
PECVD	Y	Y	Y		Y	GHC
LPCVD	Y	Y	Y		Y	GHC
SACVD	Y		Y	Y	Y	GHC
MOCVD	Y			Y	Y	GHC
MetalEtch	Y	Y				GHC

New integrated claw vacuum pump GHC

● GHC series dry pump can be used in clean process, general process and harsh process, dust handling ability is very strong, is the first choice for harsh process applications, and high reliability, very low cost. ● Suitable for diversified markets, widely used in semiconductor, panel display and other industries

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Application challenges and areas

Technology	Condensation	Corrosion	Recommend products	NOTES
IMPsource	Y		GMR
Strip/Ashing			GMR
OxideEtch	Y		GMR
PolyEtch		Y	GMR
MetalEtch	Y	Y	GMR	For 6 "and 8" Feb
HDP		Y	GMR

Multi-stage Roots vacuum pump GMR

● GMR series dry pump, can be used in cleaning process and general harsh process; ● High reliability, very low cost; ● It is mainly suitable for etching and ion implantation process cavity in semiconductor industry.

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Application challenges and areas

Technology	Condensation	Recommend products
loadlock		GLR
Transfer		GLR
PVD		GLR
Coater	Y	GLR

Multi-stage Roots vacuum pump GLR

● GLR series dry pump, can be used in cleaning process, general process, and reliable High sex, very low cost of use ● Suitable for diversified markets, widely used in semiconductor, panel display, LED, Lithium and solar photovoltaic industries

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Beijing Grand Hitek Co.,Ltd

Telephone:+86-10-86229784

E-mail:sales@grandhitek.com.cn

Headquarters Address: No.1 Courtyard, Kechuang 15th Street, Majuqiao Town, Tongzhou District, Beijing
Hebei Base: Building 4, Environmental Protection Industrial Park, South Development Zone, Gu 'an County, Langfang City, Hebei Province
Hubei Base: No.1 Huahai Avenue, Huangzhou District, Huanggang City, Hubei Province
Zhejiang Base: Building 6, Yuexing Science Park, No.11 Prosperous Road, Lihai Street, Binhai New District, Shaoxing City
Shenzhen Base: Building 2, Colorful Industrial Park, No.8, Lanzhu East Road, Pingshan District, Shenzhen
Wuxi Base: Building 6, No.3, Rongyang 1st Road, Xishan Economic and Technological Development Zone, Wuxi City
Shanghai Base: Building 9, Fuhai Business Garden, Lane 299, Bi Sheng Road, Pudong New Area, Shanghai

Minhang Base: Building 4, Jindiwei Xinda Di Artificial Intelligence Innovation Industry Base, No. 99 Suijiang Road, Minhang District, Shanghai

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