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GHC Series New Integrated Claw Dry Vacuum Pump
GHC Series New Integrated Claw Dry Vacuum Pump

GHC Series New Integrated Claw Dry Vacuum Pump

● GHC series dry pumps can be used in clean processes, general processes and harsh process applications. They have strong dust handling capabilities and are the first choice for harsh process applications. They have high reliability and extremely low operating cost; ● Suitable for diversified markets and widely used in semiconductor, advanced displays and other industries.

Detailed

● GHC series dry pumps can be used in clean processes, general processes and harsh process applications. They have strong dust handling capabilities and are the first choice for harsh process applications. They have high reliability and extremely low operating cost;

● Suitable for diversified markets and widely used in semiconductor, advanced displays and other industries.

 

Application Challenges and Application Areas

Process Condensation Corrosion Dust Thermal Reaction

Combustible Gas Pumping

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ALD ● ● ● ● ● GHC
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SACVD ●   ● ● ● GHC
MOCVD ●     ● ● GHC
Metal Etch ● ●       GHC

 

Technical Specifications

Model Maximum Pumping Speed Ultimate Pressure Inlet Port Diameter Exhaust Port Diameter Supply Voltage Rated power Operating Power Cooling Water Nitrogen Weight Noise
(m3/h) (mbar) (ISO) (NW) （V） （kW） （kW） (L/min) （slm） （kg） dB(A)
GHC200 220 ＜2×10-2 100 40 208/380 7.5 2.7 2.7 20-40 265 ＜70
GHC500 510 ＜2×10-2 100 40 208/380 11 6 6 40-90 360 ＜70
GHC600 680 ＜5×10-3 100 40 208/380 12 4.1 3 40-90 467 ＜70
GHC1200 1250 ＜5×10-3 100 40 208/380 12 4.6 4.2 40-90 467 ＜70
GHC1800 1850 ＜5×10-3 160 40 208/380 12 4.9 4.7 40-90 500 ＜70
GHC3000 3200 ＜5×10-3 160 40 208/380 18.5 7.8 11 40-130 853 ＜70
GHC5000 4480 ＜5×10-3 200 40 208/380 18.5 9.3 11 40-130 905 ＜70
GHC6000 5500 ＜5×10-3 250 40 208/380 18.5 9.3 11 40-130 945 ＜70

 

Dimensions

Model Length（mm） Width（mm） Height（mm）
GHC200 1150 442 519
GHC500 1196 580 617
GHC600 901 396 790
GHC1200 901 396 790
GHC1800 901 396 787
GHC3000 1000 517 970
GHC5000 1000 517 970
GHC6000 1100 517 970

 

Pumping Speed Curve

WeChat Public Number

WeChat Official Account

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Beijing Grand Hitek Co.,Ltd

Telephone:+86-10-86229784

E-mail:sales@grandhitek.com.cn

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