Products and Services
Phecda Integrated Single-Pump Vacuum System
- Detailed description
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- Commodity name: Phecda Integrated Single-Pump Vacuum System
● Phecda is an integrated single-pump integrated module for Diffusion, EPI, MOCVD and other processes, including dry vacuum pumps and exhaust gas abatement system; ● It has the advantages of safety, reliability, stable operation, predictive maintenance, and smaller footprint.
● Phecda is an integrated single-pump integrated module for Diffusion, EPI, MOCVD and other processes, including dry vacuum pumps and exhaust gas abatement system.
Features
Safe and reliable:
● Passed SEMI S2/S6/S8/F47 certification to ensure safe operation;
● Anti-backfire design to curb flame reflux;
● Real-time monitoring of dedicated energetic gas to ensure safety;
● System-wide pressure leak detection to avoid local leakage;
● It has explosion-proof function to avoid the evacuation of the entire plant and ensure the safety of personnel and equipment.
Stable operation:
● Adopting the overall BKM setting, it is easy to realize system-level linkage, reduce dust backflow and wafer scrapping, and effectively improve MTBF;
● Significantly shorten the pump to exhaust gas abatement pipeline, reasonably control the temperature, avoid condensation blockage, and fundamentally reduce the risk of explosion.
Predictive maintenance to reduce TCO:
● Early warning and predictive maintenance reduce Wafer scrapping losses caused by abnormal downtime;
● Reduce the frequency of spare parts damage, effectively reducing COO.
Smaller footprint:
● Modular design, the area occupied by a single machine is 16%+ saved compared with competing products.
Product inquiry
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WeChat Official Account
Beijing Grand Hitek Co.,Ltd
Telephone:+86-10-86229784
E-mail:sales@grandhitek.com.cn
Headquarters address: No. 1, Kechuang 15 Jie (St) , Beijing Economic Technological Development Area
Hebei base: Building 9, Environmental Protection Industrial Park, South District, Gu'an County Industrial Zone, Langfang City
Hubei base: Attached fifth floor, Commercial Building, No. 366, Lin Konggang Avenue, Jinghe Street, Dongxihu District, Wuhan
Zhejiang base: Building 17, No. 2723, Fuchunwan Avenue, Chunjiang Street, Fuyang District, Hangzhou
Shaanxi base: Building 2, No. 46, Zhangbawu Road, Xi'an High-tech Zone
Shanghai Base: Building 9, Fuhai Business Court, Lane 299, Bisheng Road, Pudong New District, Shanghai
Minhang Base: Building 4, No. 99 Suijiang Road, Minhang District, Shanghai
Sichuan Base: Building 9, No. 665 Fujia Street, Huangjia Street, Chengdu Shuangliu Economic Development Zone, Shuangliu District, Chengdu City
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