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Megrez Integrated Plasma Vacuum System

● Megrez is a plasma integrated machine developed by Grand Hitek for WN and some heavy SiO2 dust processes (HARP, PE-TEOS, etc.); ● Integrating the plasma generator and vacuum pump into one system can safely and efficiently extend the service life of dry pumps in related processes.
  • Detailed description
    • Commodity name: Megrez Integrated Plasma Vacuum System

    ● Megrez is a plasma integrated machine developed by Grand Hitek for WN and some heavy SiO2 dust processes (HARP, PE-TEOS, etc.); ● Integrating the plasma generator and vacuum pump into one system can safely and efficiently extend the service life of dry pumps in related processes.

    ● Megrez is a plasma integrated machine developed by Grand Hitek for WN and some heavy SiO2 dust processes (HARP, PE-TEOS, etc.);

    ● Integrating the plasma generator and vacuum pump into one system can safely and efficiently extend the service life of dry pumps in related processes.

     

    Technical specifications

    Parameters Measurement Unit‌ Megrez
    Integrated Vacuum Pump Model / GHC5000T
    Ultimate Pressure mbar 5×10-3
    Inlet Port Diameter / ISO100
    Exhaust Port Diameter / NW40
    Maximum Pumping Speed m³/h 7000
    Supply Voltage V 220
    KVA / 36.8
    Full Load Current FLA 102
    Cooling Water L/min 18
    Nitrogen slm 96/133
    Weight kg 650
    Noise dB(A) ＜75
    Length mm 1300
    Width mm 710

    Height

    		 mm 1981

     

    Pumping Speed Curve

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Beijing Grand Hitek Co.,Ltd

Telephone:+86-10-86229784

E-mail:sales@grandhitek.com.cn

Headquarters address: No. 1, Kechuang 15 Jie (St) , Beijing Economic Technological Development Area

Hebei base: Building 9, Environmental Protection Industrial Park, South District, Gu'an County Industrial Zone, Langfang City

Hubei base: Attached fifth floor, Commercial Building, No. 366, Lin Konggang Avenue, Jinghe Street, Dongxihu District, Wuhan

Zhejiang base: Building 17, No. 2723, Fuchunwan Avenue, Chunjiang Street, Fuyang District, Hangzhou

Shaanxi base: Building 2, No. 46, Zhangbawu Road, Xi'an High-tech Zone

Shanghai Base: Building 9, Fuhai Business Court, Lane 299, Bisheng Road, Pudong New District, Shanghai

Minhang Base: Building 4, No. 99 Suijiang Road, Minhang District, Shanghai

Sichuan Base: Building 9, No. 665 Fujia Street, Huangjia Street, Chengdu Shuangliu Economic Development Zone, Shuangliu District, Chengdu City

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