中

Products and Services

Hot Products

GLR Series Multistage Roots Dry Vacuum Pump

GLR-P Series Multistage Roots Dry Vacuum Pump

GS Series New Integrated Claw Dry Vacuum Pump

GHC Series New Integrated Claw Dry Vacuum Pump

Alioth Integrated Multi-Pump Vacuum System

● Alioth is an integrated multi-pump integrated module (vacuum pump + exhaust gas abatement system), specially designed to improve process safety and equipment operation stability; ● It can significantly reduce TCO (total cost of ownership), Hookup costs and Facility point requirements, significantly save floor space and shorten installation time.

Detailed description

Commodity name: Alioth Integrated Multi-Pump Vacuum System

● Alioth is an integrated multi-pump integrated module (vacuum pump + exhaust gas abatement system), specially designed to improve process safety and equipment operation stability;

● It can significantly reduce TCO (total cost of ownership), Hookup costs and Facility point requirements, significantly save floor space and shorten installation time.

Application Challenges and Solutions

Semiconductor Process								Advantages
Process/Application Challenges	Easy to Explode （H₂，SiH_{4, etc.}）	Heavy Corrosion	High Dust	Thermal Decomposition	Easy to Condense	Footprint&Hookup	Recommended Products	Footprint	Hookup Cost
WCVD	●	●	●	●		●	Alioth	Small footprint	Lower
PECVD	●	●	●		●	●	Alioth	Small footprint	Lower

Customer Value

Product Features

Product inquiry

Note: Please leave your E-mail and our professionals will contact you as soon as possible!

Submit immediately

COOKIES

Our website uses cookies and similar technologies to personalize the advertising shown to you and to help you get the best experience on our website. For more information, see our Privacy & Cookie Policy

COOKIES

required

These cookies are necessary for basic functions such as payment. Standard cookies cannot be turned off and do not store any of your information.

analyze

These cookies collect information, such as how many people are using our site or which pages are popular, to help us improve the customer experience. Turning these cookies off will mean we can't collect information to improve your experience.

Feature

These cookies enable the website to provide enhanced functionality and personalization. They may be set by us or by third-party providers whose services we have added to our pages. If you do not allow these cookies, some or all of these services may not function properly.

advertise

These cookies help us understand what you are interested in so that we can show you relevant advertising on other websites. Turning these cookies off will mean we are unable to show you any personalized advertising.

Beijing Grand Hitek Co.,Ltd

Telephone:+86-10-86229784

E-mail:sales@grandhitek.com.cn

Headquarters address: No. 1, Kechuang 15 Jie (St) , Beijing Economic Technological Development Area

Hebei base: Building 9, Environmental Protection Industrial Park, South District, Gu'an County Industrial Zone, Langfang City

Hubei base: Attached fifth floor, Commercial Building, No. 366, Lin Konggang Avenue, Jinghe Street, Dongxihu District, Wuhan

Zhejiang base: Building 17, No. 2723, Fuchunwan Avenue, Chunjiang Street, Fuyang District, Hangzhou

Shaanxi base: Building 2, No. 46, Zhangbawu Road, Xi'an High-tech Zone

Shanghai Base: Building 9, Fuhai Business Court, Lane 299, Bisheng Road, Pudong New District, Shanghai

Minhang Base: Building 4, No. 99 Suijiang Road, Minhang District, Shanghai

Sichuan Base: Building 9, No. 665 Fujia Street, Huangjia Street, Chengdu Shuangliu Economic Development Zone, Shuangliu District, Chengdu City

Business License