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Mizar Integrated Vacuum System

● Mizar pump group is an integrated stacked pump system. The system adopts a mechanical booster pump-mechanical booster pump-dry pump structure. It can be used in clean processes, general processes and harsh process applications, and has high reliability and low operating cost.

Detailed description

Commodity name: Mizar Integrated Vacuum System

Application Callenges and Solutions

Process	High-flow H₂（＞100slm）	Thermal Decomposition	Recommended Products
HJT PECVD a-Si	●	●	Mizar
ALD	●	●	Mizar

Technical Specifications

Specifications	Measurement Unit	Mizar
Structure	/	Stacked
Pump on	/	GMB6000
Pump down	/	GS3000
LengthWidthHeight	mm	15258001662
Maximum Pumping Speed	m³/h	7000
Ultimate Pressure	mbar	＜5×10^-4
Inlet Port Diameter	/	ISO250
Exhaust Port Diameter	/	NW40
Supply Voltage	/	380-480V-3Ø-50/60Hz-3W+Gnd/PE
Rated Power	kw	7.5+18.5
Operating Power	kw	1.9+7.3
Cooling Water Flow	lpm	15
Nitrogen Flow	slm	96/133
Maximum Noise	dB(A)	＜75
Weight	kg	1450

Pumping Speed Curve

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Beijing Grand Hitek Co.,Ltd

Telephone:+86-10-86229784

E-mail:sales@grandhitek.com.cn

Headquarters address: No. 1, Kechuang 15 Jie (St) , Beijing Economic Technological Development Area

Hebei base: Building 9, Environmental Protection Industrial Park, South District, Gu'an County Industrial Zone, Langfang City

Hubei base: Attached fifth floor, Commercial Building, No. 366, Lin Konggang Avenue, Jinghe Street, Dongxihu District, Wuhan

Zhejiang base: Building 17, No. 2723, Fuchunwan Avenue, Chunjiang Street, Fuyang District, Hangzhou

Shaanxi base: Building 2, No. 46, Zhangbawu Road, Xi'an High-tech Zone

Shanghai Base: Building 9, Fuhai Business Court, Lane 299, Bisheng Road, Pudong New District, Shanghai

Minhang Base: Building 4, No. 99 Suijiang Road, Minhang District, Shanghai

Sichuan Base: Building 9, No. 665 Fujia Street, Huangjia Street, Chengdu Shuangliu Economic Development Zone, Shuangliu District, Chengdu City

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