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Semiconductor industry Y2O3 coating

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Semiconductor industry Y2O3 coating

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Y2O3 Coating is used for surface spraying of semiconductor DRY ETCH equipment, which can effectively absorb pollutants in the process. Y2O3 coating has excellent properties such as etching resistance and wear resistance, which can improve the service life of equipment spare parts and reduce the time required for customers to replace equipment spare parts. cost.

 

Product number:INNER LINER;UPPER ELECTRODE;GAS INTECTOR;

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Time of issue:2019-05-23 00:00:00

  

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