Semiconductor Industry Y2O3 coating
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- Specifications
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- Commodity name: Semiconductor Industry Y2O3 coating
Y2O3 Coating is used for table spraying of semiconductor DRY ETCH equipment, which can effectively adsorb pollutants in the process.
Y2O3 Coating is used for table spraying of semiconductor DRY ETCH equipment, which can effectively adsorb pollutants in the process. Y2O3 coating has excellent properties such as etching resistance and wear resistance, which can improve the service life of equipment spare parts and reduce the cost required for customers to replace equipment spare parts.
PRODUCT MODEL:INNER LINER;UPPER ELECTRODE;GAS INTECTOR;
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