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TEL seal

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Product description: It is a sealing ring developed for TEL equipment in DRY ETCH process in 6G, 8.5G and 10.5G. Available in VITON, high fluorine and perfluorinated materials. Compared with similar products from other manufacturers, it has better plasma resistance; high temperature resistance, can be used at 300 ℃ for a long time; good compression set and low expansion coefficient.

 

 

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We could not find any corresponding parameters, please add them to the properties table

PROCESS

GEN.

Material

SIZE

 
 

DRY ETCH

6G

FKM/FFKM

2780*6.98

 

Viton/FKM

2815*8.4

 

8.5G

FKM/FFKM

3770*8.40

 

Viton/FKM

3815*8.40

 

FFKM

1520*6.98

 

Viton/FKM/FFKM

1511*3.53

 

Viton/FKM

3046*5.33

 

10.5G

FKM/FFKM

4640*8.40

 

Viton/FKM/FFKM

2752*3.53

 

Viton/FKM

4100*5.33

 

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Time of issue:2019-05-23 00:00:00

  

Contact

TEL:  010-53359485

PH:13126751928

E-mail:  sales@grandhitek.com.cn

Headquarters address: No. 12 building, Hongkun Zhigu industrial park, Xihongmen, Daxing District, Beijing

 

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