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New integrated claw vacuum pump GHC
New integrated claw vacuum pump GHC

New integrated claw vacuum pump GHC

● GLR series dry pump, can be applied to clean process, general process. ● GHC series dry pump, can be used in harsh process, and high reliability, low cost. ● GLR and GHC series dry pumps are suitable for diversified markets and are widely used in FPD/LED and other industries.

Detailed

● GLR series dry pump, can be used in cleaning process, general process. 
● GHC series dry pump, can be used in harsh process, and high reliability, low cost. 
● GLR and GHC series dry pumps are suitable for diverse markets and are widely used in FPD/LED industries.

 

Application challenges and areas

 

Classify Technology Condensation Corrosion Dust Pumping  Recommend products
light PVD       Y GLRseries
LL/TC       Y GLRseries
Evaporation       Y GLRseries
Lami fit       Y GLRseries
harsh PECVD  Y   Y   GHCseries
ETCH   Y Y   GHCseries
coater PHOTO Y       GLR-Pseries

 

Technical parameters

 

  Maximum pumping speed Ultimate vacuum Inlet diameter Outlet diameter Supply voltage Rateing power Operating power Cooling water Notrogen Weight Noise
Model （m3/h） (mbar) （ISO） （NW） （V） （kw） （KW） （L/m） （slm） （kg） dB(A)
GHC1200T 1250 ＜5×10-3 100 40 208/380 12 4.9 4.1 40/90 467 ＜70
GHC1800T 1850 ＜5×10-3 160 40 208/380 12 4.9 4.2 40/90 500 ＜70
GHC3000T 3300 ＜5×10-3 160 40 208/380 18.5 9.3 12 90/130 853 ＜70
GHC5000T 4480 ＜5×10-3 200 40 208/380 18.5 9.3 12 90/130 905 ＜70
GHC6000T 5500 ＜5×10-3 250 40 208/380 18.5 9.3 12 90/130 945 ＜70
GLR3000P 3350 ＜7×10-3 160 50 208/380 26 8.5 6 4-50 820 ＜80
GLR2000 2320 ＜7×10-3 160 50 208/380 26 7 6 4-12 820 ＜80

 

 

Product size

 

Model length（mm） wide（mm） height（mm）
GHC1200T 901 396 787
GHC1800T 901 396 787
GHC3000T 1000 517 970
GHC5000T 1000 517 970
GHC6000T 1080 517 970
GLR3000P 1370 680 1015
GLR2000 1370 680 1015

 

Pumping speed curve

WeChat Public Number

WeChat Public Number

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Beijing Grand Hitek Co.,Ltd

Telephone:+86-10-86229784

E-mail:sales@grandhitek.com.cn

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