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GLR Series Multistage Roots Dry Vacuum Pump

GLR-P Series Multistage Roots Dry Vacuum Pump

GS Series New Integrated Claw Dry Vacuum Pump

GHC Series New Integrated Claw Dry Vacuum Pump

Semiconductor

Application Challenges and Application Areas

GLR Series Multistage Roots Dry Vacuum Pump

● GLR series dry pumps can be used in clean processes and general processes, with high reliability and extremely low operating cost; ● Suitable for diversified markets, widely used in semiconductor, advanced displays, LED, lithium-ion battery and solar PV industries.

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Application Challenges and Application Area

Process	Condensation	Corrosion	Dust	Thermal Reaction	Combustible Gas Pumping	Recommended Products
ALD	●	●	●	●	●	GHC
PECVD	●	●	●		●	GHC
LPCVD	●	●	●		●	GHC
SACVD	●		●	●	●	GHC
MOCVD	●			●	●	GHC
Metal Etch	●	●				GHC

GHC Series New Integrated Claw Dry Vacuum Pump

● GHC series dry pumps can be used in clean processes, general processes and harsh process applications. They have strong dust handling capabilities and are the first choice for harsh process applications. They have high reliability and extremely low operating cost; ● Suitable for diversified markets and widely used in semiconductor, advanced displays and other industries.

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Application Challenges and Application Areas

Category	Process	Condensation	Corrosion	Dust	Frequent pumping	Recommend Products
light	PVD				●	GLR Series
	LL/TC				●	GLR Series
	Evaporation				●	GLR Series
	Lami fit				●	GLR Series
harsh	PECVD	●		●		GLR Series
harsh	ETCH		●	●		GLR Series
coater	PHOTO	●				GLR-P Series

GLR Series Multistage Roots Dry Vacuum Pump

● GLR series dry pumps can be used in clean processes and general processes; ● GLR series dry pumps are suitable for diversified markets and are widely used in FPD/LED and other industries.

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Beijing Grand Hitek Co.,Ltd

Telephone:+86-10-86229784

E-mail:sales@grandhitek.com.cn

Headquarters address: No. 1, Kechuang 15 Jie (St) , Beijing Economic Technological Development Area

Hebei base: Building 9, Environmental Protection Industrial Park, South District, Gu'an County Industrial Zone, Langfang City

Hubei base: Attached fifth floor, Commercial Building, No. 366, Lin Konggang Avenue, Jinghe Street, Dongxihu District, Wuhan

Zhejiang base: Building 17, No. 2723, Fuchunwan Avenue, Chunjiang Street, Fuyang District, Hangzhou

Shaanxi base: Building 2, No. 46, Zhangbawu Road, Xi'an High-tech Zone

Shanghai Base: Building 9, Fuhai Business Court, Lane 299, Bisheng Road, Pudong New District, Shanghai

Minhang Base: Building 4, No. 99 Suijiang Road, Minhang District, Shanghai

Sichuan Base: Building 9, No. 665 Fujia Street, Huangjia Street, Chengdu Shuangliu Economic Development Zone, Shuangliu District, Chengdu City

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