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New integrated claw vacuum pump GHC
New integrated claw vacuum pump GHC

New integrated claw vacuum pump GHC

● GHC series dry pump can be used in clean process, general process and harsh process, dust handling ability is very strong, is the first choice for harsh process applications, and high reliability, very low cost. ● Suitable for diversified markets, widely used in semiconductor, panel display and other industries

Detailed

● GHC series dry pump can be used in clean process, general process and harsh process, dust handling ability is very strong, is the first choice for harsh process applications, and high reliability, very low cost.
● Suitable for diversified markets, widely used in semiconductor, panel display and other industries

 

Application challenges and areas

 

Technology Condensation Corrosion Dust Combustible gas pumping Recommend products
PECVDSiN Y Y   Y GHC
PECVDSiON Y Y Y Y GHC
PECVDSiO2   Y Y Y GHC
MetalEtch Y Y     GHC
Non-MetalEtch   Y     GHC

 

Technical parameters

 

  Maximum pumping speed Ultimate vacuum Inlet diameter Outlet diameter Supply voltage Rateing power Operating power Cooling water Notrogen Weight Noise
Model (m3/h) (mbar) (ISO) (NW) （V） （kW） （kW） (L/min) （slm） （kg） dB(A)
GHC200 215 ＜2×10-2 100 40 208/380 7.5 2.7 2.7 22-44 265 ＜70
GHC500 510 ＜2×10-2 100 40 208/380 11 6 6 44-96 411 ＜70
GHC600 680 ＜5×10-3 100 40 208/380 12 2.3 3 22-44 468 ＜70
GHC1200 1200 ＜5×10-3 100 40 208/380 12 3 4.1 44-96 468 ＜70
GHC1800 1800 ＜5×10-3 160 40 208/380 12 3.5 4.2 44-96 488 ＜70
GHC3000 3300 ＜5×10-3 160 40 208/380 18.5 7.3 12 96-128 827 ＜70
GHC5000 4480 ＜5×10-3 200 40 208/380 18.5 7.3 12 96-128 928 ＜70
GHC6000 5500 ＜5×10-3 250 40 208/380 18.5 7.3 12 96-128 973 ＜70

 

Product size

 

Model length（mm） wide（mm） height（mm）
GHC200 1150 440 520
GHC500 1240 580 620
GHC600 901 396 787
GHC1200 901 396 787
GHC1800 901 396 787
GHC3000 1000 517 970
GHC5000 1000 517 970
GHC6000 1100 517 970

 

Pumping speed curve

 

WeChat Public Number

WeChat Public Number

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