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GLR Series Multistage Roots Dry Vacuum Pump
GLR Series Multistage Roots Dry Vacuum Pump

GLR Series Multistage Roots Dry Vacuum Pump

● GLR series dry pumps can be used in clean processes and general processes; ● GLR series dry pumps are suitable for diversified markets and are widely used in FPD/LED and other industries.

Detailed

● GLR series dry pumps can be used in clean processes and general processes;

● GLR series dry pumps are suitable for diversified markets and are widely used in FPD/LED and other industries.

 

Application Challenges and Application Areas

Category Process Condensation Corrosion Dust Frequent pumping  Recommend Products
light PVD       ● GLR Series
LL/TC       ● GLR Series
Evaporation       ● GLR Series
Lami fit       ● GLR Series
harsh PECVD  ●   ●   GLR Series
ETCH   ● ●   GLR Series
coater PHOTO ●       GLR-P Series

 

Technical Specifications

Model Maximum Pumping Speed Ultimate Pressure Inlet Port Diameter Exhaust Port Diameter Supply Voltage Rated power Operating Power Cooling Water Nitrogen Weight Noise
（m3/h） (mbar) （ISO） （NW） （V） （kw） （KW） （L/m） （slm） （kg） dB(A)
GLR120 110 ＜3×10-2 63 25 208/380 2.2 0.45 1.5 0-12 69 ＜60
GLR500 500 ＜1×10-2 63 50 208/380 15 5.7 6 7-100 350 ＜70
GLR2000 2300 ＜7×10-3 160 50 208/380 26 6.7 6 7-100 750 ＜70
GLR3000 3380 ＜7×10-3 160 50 208/380 26 6.7 6 7-100 820 ＜70
GLR3500 3500 ＜5×10-3 160 50 380 26 9.5 6 4-50 820 ＜75
GLR5000 4500 ＜8×10-3 160 50 380 30 7.5 6 4-12 900 <80

 

Dimensions

Model Length（mm） Width（mm） Height（mm）
GLR120 448 230 275
GLR500 1310 620 682
GLR2000 1310 620 1002
GLR3000 1310 620 1002
GLR3500 1310 620 1002
GLR5000 1310 620 1002

 

Pumping Speed Curve

WeChat Public Number

WeChat Official Account

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Beijing Grand Hitek Co.,Ltd

Telephone:+86-10-86229784

E-mail:sales@grandhitek.com.cn

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